Products - Services - Device Processing Foundry Services - Thin-Film Deposition Systems: Metal & Dielectrics
|
| Spectrolab utilizes high-throughput, high-yield, e-beam evaporation systems to deposit multiple-film layers on wafers including optical coatings and contact metalizations.
BOSCH Sputtering System
• DC & RF Co-sputtering,
Sputter-down
configuration
Temescal 1800
• E-beam Systems
|
|
| CHA mark 50 e-beam systems |
CHA Mark 50 E-beam Systems
• Fifty-six, four-inch wafer/run throughput
• Reactive-oxide depositions
• Multi-layer metal contact deposition
|
